A MEMS Piezoelectric Cantilever Beam Array for Vibration Energy Harvesting

Abstract:

A micro piezoelectric cantilever beam array is designed for vibration energy harvesting. A single degree of freedom analytical model is developed to predict the properties of the device and is verified by finite element method. The piezoelectric material Aluminum Nitride was chosen for the compatibility with the CMOS process. The devices consisting of 5 piezoelectric cantilever beams and one proof mass were fabricated using micromachining technology. The resonance frequency, voltage and power were tested at excitation acceleration of 5.0 g. The maximum output power of the device is 9.13 μW at the resonance frequency of 1315 Hz when piezoelectric beams are connected in parallel.

• Periodical: Key Engineering Materials (Volumes 562-565)
• Pages: 1052-1057
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.1052
• Online since: July 2013
• Authors: Xing Qiang Zhao, Zhi Yu Wen, Li Cheng Deng, Guo Xi Luo, Zheng Guo Shang, Dong Ling Li
• Keywords: Harvesting, MEMS Device, Piezoelectric, Single Degree of Freedom, Vibration Energy

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