Research on Zero Bias Characteristic of MEMS Accelerometer in FBW

Lun Chao Zhong; Jian Zhong Wang; Jia Dong Shi

doi:10.4028/www.scientific.net/KEM.609-610.1046

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 609-610Research on Zero Bias Characteristic of MEMS...

Research on Zero Bias Characteristic of MEMS Accelerometer in FBW

Abstract:

Zero bias is an important performance index of MEMS accelerometerscope. Based on the large amount of given accelerometer experiments, we study zero bias of random error properties, temperature characteristic, large overload environment variation, and then calculate MEMS accelerometer bias, bias stability, zero bias repeatability. Through least-square method,we fit temperature scale factor and temperature bias of MEMS accelerometer. The experimental results show that the compensation method has the advantages of simple operation, effectively compensation for measuring error of MEMS accelerometer which is induced by temperature, and has strong engineering using value.

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Periodical:

Key Engineering Materials (Volumes 609-610)

Pages:

1046-1052

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.609-610.1046

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Online since:

April 2014

Authors:

Lun Chao Zhong, Jian Zhong Wang*, Jia Dong Shi

Keywords:

Least-Square Method (LSM), Mechanical Zero, MEMS Accelerometer, Zero Bias

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