Sliding Mode Control for Electromagnetic Actuation MOEMS Scanning Mirror

Abstract:

Sliding Mode Control (SMC) based on exponential switching law for electromagnetic actuation MOEMS mirror was proposed. This technique relies on the movable mass and the dynamics of the sliding surface. In such a way, the generated actuation tracks possible changes in the mechanical behavior induced by external factors (humidity, temperature, pressure, etc.). Stability of the proposed method is proved by Lyapunov second method. The system level model is established and simulated using MATLAB/Simulink. Simulation results show that: the scanning angle converges to reference value in only 0.45 seconds when using exponential switching law, which is decreased 55% compared with that using proportional switching law, and the sliding surface is much smooth too; the tracking error less than 0.25%, and sliding surface jittering in the range of 0.5. The proposed SMC controller can realize accurate control of mirror and having high performance and robustness in the presence of external disturbances and also can be applied to the closed-loop control of other vibrating devices.

• Periodical: Key Engineering Materials (Volumes 609-610)
• Pages: 1283-1288
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.609-610.1283
• Online since: April 2014
• Authors: Hui Zhou, Li Chen*, Jun Bo Wang, Zuo Jun Zhang, Dan Hua Chen
• Keywords: Exponential Switching Law, Sliding Mode Control, Sliding Surface

References

[1] Qian Rongrong. Research of MOEMS Scanning Mirror Integrated with Angle Sensor[D]. Chongqing University, (2011).

[2] Luo Biao, Wen Zhiyu, Chen Li. Testing and Analysis of the MOEMS Scanning Mirror[J]. Nanotechnology and Precision Engineering, 2012, 10(4): 307-312.

[3] Zhang Qiwei. Two-vibration silicon micro-machined gyroscope digital measurement and control technology[D]. Southeast University, (2009).

[4] Wang Yuliang. Research on key technology of digital signal processing circuitry for silicon micro-gyroscope[D]. Southeast University, (2010).

[5] Liu Jinkun. Sliding mode control design and MATLAB simulation[M]. Beijing: Tsinghua University press, (2012).

[6] Liu Jinkun, Sun Fuchun. Research and development on theory and algorithms of sliding mode control[J]. Control Theory and Applications. 2007, 24(3): 407-418.

[7] Yi Zhao, Francis E. H. Tay, Guangya Zhou, Fook Siong Chau. Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control[J]. Sensors and Actuators A, 2006, 132(2): 421–428.

DOI: 10.1016/j.sna.2006.02.027

[8] Mehrdad Saif, Behrouz Ebrahimi, Mehdi Vali. A second order sliding mode strategy for fault detection and fault-tolerant-control of a MEMS optical switch[J]. Mechatronics, 2012, 22(6): 651-910.

DOI: 10.1016/j.mechatronics.2012.02.008

[9] Juntao Fei. Adaptive Sliding Mode Control with Bound Estimation for MEMS Angular Rate Sensor[C]. Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, Harbin, 2007: 1565-1569.

DOI: 10.1109/icma.2007.4303782

[10] Juntao Fei. Adaptive sliding mode control with application to a MEMS vibratory gyroscope[D]. The University of Akron, (2007).

[11] Elie H. arraf, Mrigank Sharma, Edmond Cretu. Novel band-pass sliding mode control for driving MEMS-based resonators[J] Sensors and Actuators A: Physical, (2012).

DOI: 10.1016/j.sna.2012.01.005