Design of Micromachining System Based on Nanosecond Pulsed Laser

Dong Xu; Yao Yao; Xing Fu; Chao Wang

doi:10.4028/www.scientific.net/KEM.645-646.1049

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Fabrication of Convex Plate-Shaped Micro Tool Electrode and its Application in Micro Hole Machining by ECM
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Design of Micromachining System Based on Nanosecond Pulsed Laser
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Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser
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Constructing Dual Band Metamaterial Absorbers at Mid-Infrared by Employing Multi-Resonant Structures
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Structure Design of Large Travel One-Arm Bridge Type Z-Axis Nano-Positioning Stage
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Effect of Undercut on the Characterization of the Mechanical Properties of Silicon Nanocantilevers with Dynamic and Static Test
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646Design of Micromachining System Based on...

Design of Micromachining System Based on Nanosecond Pulsed Laser

Abstract:

In recent years, pulsed laser processing technology is widely used in MEMS device manufacturing, aerospace technology, precision instrument manufacturing and circuit board processing. According to the characteristics of nanosecond laser, this paper designs a novel nanosecond pulsed laser micromachining system with PMAC card as its core unit. The system can achieve automation control of laser parameters and movement pattern of motion system by software, which can easily realize automatic processing of point, line, and plane structure in micron scale. In this paper, several groups of experiments are taken to test the reliability and accuracy of the machining system and find the group to obtain the best processing result.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

1049-1053

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.1049

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Online since:

May 2015

Authors:

Dong Xu, Yao Yao, Xing Fu*, Chao Wang

Keywords:

Microstructure, Nanosecond Laser, PMAC

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* - Corresponding Author

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