Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser

Li Jun Yang; Bai Cheng; Yang Wang

doi:10.4028/www.scientific.net/KEM.645-646.1054

Paper Titles

Experimental Investigation of Thermal Conduction Performance on Silicon-Based Micro Flat Heat Pipe
p.1032

Analysis of Effective Field Emitting Angle for Spindt Cathode
p.1038

Fabrication of Convex Plate-Shaped Micro Tool Electrode and its Application in Micro Hole Machining by ECM
p.1043

Design of Micromachining System Based on Nanosecond Pulsed Laser
p.1049

Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser
p.1054

Constructing Dual Band Metamaterial Absorbers at Mid-Infrared by Employing Multi-Resonant Structures
p.1059

Structure Design of Large Travel One-Arm Bridge Type Z-Axis Nano-Positioning Stage
p.1064

Effect of Undercut on the Characterization of the Mechanical Properties of Silicon Nanocantilevers with Dynamic and Static Test
p.1072

Implementation of Convolutional Encoder in Quantum-Dot Cellular Automata
p.1078

HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646Experimental Research on Nanostructure Fabricated...

Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser

Abstract:

Although the nanostructure machining by AFM probe assisted with laser has gain a great progress, few studies has been done on the optical fiber probe guiding the continuous laser to irradiate on AFM probe to machining nanostructure. Using this technology to create nanodot and nano-groove was presented in this paper. The law of how the experiment parameters influenced the results was summarized in the paper. The scale of nanodot is about 450nm, and nano-groove is about 40nm. When the fabrication is completed, the wear of the AFM probe was observed by SEM and drew a conclusion. In the method of nano machining by AFM Probe combining with a CW Laser, there will be a combined field to achieve the fabrication, and the method is better than mechanical characterization with AFM probe.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

1054-1058

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.1054

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Online since:

May 2015

Authors:

Li Jun Yang*, Bai Cheng, Yang Wang

Keywords:

AFM Probe, Fabrication, Laser, Nanostructure

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