A 3D All-Solid-State Thin Film Microbattery with Inverted Pyramid Arrays

Jie Lin; Jian Lai Guo; Chang Liu; Hang Guo

doi:10.4028/www.scientific.net/KEM.645-646.1170

Paper Titles

VCu_xO_y Thin Film by Magnetron Sputtering as Cathode Material for Thin Film Lithium-Ion Microbatteries
p.1145

High Performance Supercapacitor Electrode Materials Based on Activated Carbon and Conducting Polypyrrole
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Electrohydrodynamic Atomization Deposition of Fuel Cell Catalyst-Coated Membrane with Structure and Material Gradient Variation
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Secondary Synthesis of Microporous Heteroatoms Y Zeolite and their Hydrodesulfurization Properties for Model Fuel
p.1163

A 3D All-Solid-State Thin Film Microbattery with Inverted Pyramid Arrays
p.1170

Formation of Membrane Electrode Assembly for High Temperature Methanol Fuel Cells
p.1175

Asymmetric Design of Anode and Cathode Current Collectors for Micro Direct Methanol Fuel Cells
p.1181

Study on the Energy Harvesting Performance of PE Cantilever Beam
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To Improve Micro-Planar-Magnetic Generator Performance Based on Addition of Magnetic Material
p.1195

HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646A 3D All-Solid-State Thin Film Microbattery with...

A 3D All-Solid-State Thin Film Microbattery with Inverted Pyramid Arrays

Abstract:

A 3D all-solid-state thin film lithium-ion microbattery (TFLM) with inverted pyramid arrays is fabricated by microfabrication technology. Compared with 2D TFLMs, the effective area of this 3D TFLM increases more than 30%. The 3D TFLM prepared by magnetron sputtering is composed of LiCoO₂ cathode, LiPON solid electrolyte, and copper doped SnO_x anode. The 3D TFLM is tested by electrochemical measurements, and the results show that it has reliable capacity and excellent performance.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

1170-1174

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.1170

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Online since:

May 2015

Authors:

Jie Lin, Jian Lai Guo, Chang Liu, Hang Guo*

Keywords:

3D Thin Film Microbattery, Inverted Pyramid, Magnetron Sputtering, Microfabrication

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* - Corresponding Author

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