Multi-Chip Module Design of a MEMS Air Pressure Sensor

Guang Xiu Yao; Han Yu Du; Qing An Huang; Meng Nie

doi:10.4028/www.scientific.net/KEM.645-646.636

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Noise Analysis of Silicon Microgyroscope's Transimpedance Amplifier Interface Circuit
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Micromachined Tri-Axis Capacitive Accelerometer Based on the Single Mass
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Multi-Chip Module Design of a MEMS Air Pressure Sensor
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A Modulated Feedback Approach to Improve Closed Loop MEMS Accelerometer Bias Instability
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A Second Differential Bandpass Filter with Tuning Center Frequency and Constant Q
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A Feed-Forward Sigma-Delta Modulator Applied in Silicon Gyroscope
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 645-646Multi-Chip Module Design of a MEMS Air Pressure...

Multi-Chip Module Design of a MEMS Air Pressure Sensor

Abstract:

A MEMS air pressure sensor system is proposed in the paper, which can monitor the air pressure by means of measuring the discharge time of the sensor. The system contains two parts: the MEMS air pressure sensor and the data acquisition system. The MEMS air pressure sensor is an enhanced pizeoresistive pressure sensor. The data acquisition system contains a time-to-digital part, which measures time interval by using of the propagation delays of logical gates. The time-to-digital part can measure the resistors’ discharge time and turn it into digital output, when the resistors on the air pressure sensor are connected to a capacitor which is full of charge. The discharge time is only related to the resistor, and then the pressure measurement is changed to time measurement. The digital output is shown through a liquid crystal display screen.

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Periodical:

Key Engineering Materials (Volumes 645-646)

Pages:

636-639

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.645-646.636

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Online since:

May 2015

Authors:

Guang Xiu Yao, Han Yu Du, Qing An Huang, Meng Nie*

Keywords:

MEMS, Multi-Chip Module, Pizeoresistive Pressure Sensor

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* - Corresponding Author

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