Active Disturbance Rejection Control Design for Fast AFM

Abstract:

Active disturbance rejection control (ADRC) as an alternative to classical PID control to solving control problems, has gained significant traction these years. With its simple tuning method, robustness against process parameter variations and ability of disturbance rejection, we tried it in our homemade fast atomic force microscope (AFM). Experiments are carried out in contact mode on standard optical grating sample with 50Hz line rate. The results show that ADRC can reject external disturbances well, and can reduce system vibrations obviously.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 670-674
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.670
• Online since: May 2015
• Authors: Dai Xie Chen, Bo Hua Yin, Jun Biao Liu, Wen Ping Li, Li Qiang Wu, Han Li*
• Keywords: Active Disturbance Rejection Control, Atomic Force Microscopy, Fast Scan

References

[1] C. Steffens, F. L. Leite, C. C. Bueno, A. Manzoli, P. Sergio, and D. P. Herrmann, Atomic force microscopy as a tool applied to nano / biosensors, Sensors, 12, 8278 (2012).

DOI: 10.3390/s120608278

[2] C. Shin, K. Kim, J. Kim, W. Ko, Y. Yang, S. Lee, and Y. S. Kim, Fast, exact, and non-destructive diagnoses of contact failures in nano-scale semiconductor device using conductive AFM, Sci. Rep, 3, 2088 (2013).

DOI: 10.1038/srep02088

[3] Y. Hua, C. Buenviaje-Coggins, Y. H. Lee and S. I. Park, High-throughput and non-destructive sidewall roughness measurement using 3-dimensional atomic force microscopy, In SPIE Advanced Lithography, 83240I (2012).

DOI: 10.1117/12.918377

[4] T. Ando, High-speed atomic force microscopy coming of age, Nanotechnology, 23, 06200 (2012).

DOI: 10.1088/0957-4484/23/6/062001

[5] T. Ando, T. Uchihashi, and N. Kodera, High-speed atomic force microscopy, Japanese Journal of Applied Physics, 51, 1-15 (2012).

DOI: 10.7567/jjap.51.08ka02

[6] Jing Li, Zhifeng Deng, Daixie Chen, Zhuo Ao, Quanmei Sun, Jiantao Feng, Bohua Yin, Li Han and Dong Han. High-speed afm for scanning the architecture of living cells, Nanoscale, 5, 18, 8355-8358 (2013).

DOI: 10.1039/c3nr01464a

[7] A. J. Fleming, Dual-stage vertical feedback for high-speed scanning probe microscopy, IEEE Transactions on Control Systems Technology, 19, 1, 156-165 (2011).

DOI: 10.1109/tcst.2010.2040282

[8] S. Kuiper, and G. Schitter, Model-based feedback controller design for dual actuated atomic force microscopy, Mechatronics, 22, 3, 327-337 (2012).

DOI: 10.1016/j.mechatronics.2011.08.003

[9] Y. Yan, H. Wang, and Q. Zou, A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example, Automatica, 48, 1, 167-176 (2012).

DOI: 10.1016/j.automatica.2011.09.032

[10] J. Vincent, D. Morris, N. Usher, Z. Gao, S. Zhao, A. Nicoletti, and Q. Zheng, On active disturbance rejection based control design for superconducting RF cavities, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 643, 1, 11-16 (2011).

DOI: 10.1016/j.nima.2011.04.033

[11] L. Q. Wu, J. Q. Han, and Z. G. Hou, A novel control method for a class of cascade nonlinear systems, ICNSC '06, 654-657 (2006).

[12] J. Q. Han, From pid to active disturbance rejection control, IEEE Transactions on Industrial Electronics, 56, 3, (2009).

[13] Y. X. Su, C. H. Zheng, and B. Y. Duan, Automatic disturbances rejection controller for precise motion control of permanent-magnet synchronous motors, Industrial Electronics, 52, 814-822 (2005).

DOI: 10.1109/tie.2005.847583