Applied Research on Self-Sensing Micro-Flow Injection Device Based on Piezoelectric Ceramics

Abstract:

Experimental research of first inverse, secondary positive piezoelectric effects are performed through the PZT-5 piezoelectric ceramics. Introduce a concept of self-sensing micro-flow injection device based on piezoelectric ceramics. Utilized the characteristic of the first inverse piezoelectric effect which can generate micro-displacement, micro-position and then micro-injection can be realized by the micro-change of piezoelectric ceramic’s volume. Self-sensing displacement in micro-injection process can be obtained by utilizing the secondary direct piezoelectric effect. The experimental data: if the external voltages which were applied to the stack are 20V and 40V, the theoretical displacement generated by the first inverse piezoelectric effect are 4μm and 8μm respectively, the actual measured values are 3.57μm and 8.12μm respectively, self-sensing displacement of secondary direct piezoelectric effect are 1.48μm and 2.53μm respectively. It proves that the theoretical and experimental device could sense the displacement of micro-injection and the integration of sensor and actuator can be achieved.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 746-755
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.746
• Online since: May 2015
• Authors: Jie Huang, Li Ping Shi*, Hai Min Zhou, Xi Wen Wei, Yan Bo Wei
• Keywords: Micro-Flow Injection, Piezoelectric Ceramics, Self-Sensing

References

[1] SHI Yan-hua, HE Xiu-li, GAO Xiao-guang. MEMS Hot-film Micro Flow Sensor[J]. Micro and Nano Electronics, 2013, 50(7) , pp.434-441.

[2] ZHU Li, HOU Li-ya, ZHANG Wei-yi. The Research of Digital Micro-injection Technology Which Is Based on Piezoelectric Drive[J]. Machine Tool & Hydraulics, 2008, 36(8) , pp.17-20.

[3] Yanliang Zhang, Mingli Han, Cheng Yap Shee. Calibration of Piezoelectric Actuator-based Vision Guided Cell. International Conference on Advanced Intelligent Mechatronics, 2008: 808-812.

DOI: 10.1109/aim.2008.4601764

[4] LIU Tian-jun. Piezoelectric-driven Microinjection Instrument[J]. Machine Design and Research, 2009, 25(10): 42-44.

[5] Haibo Huang, James K. Mills, Dong Sun. A New Piezo-driven Ultrasonic Cell Microinjection System. International Conference on Ingormation and Automation, 2010: 18-23.

DOI: 10.1109/icinfa.2010.5512330

[6] HE Si-min, CHE Xiu-ge, ZHAO Xin. Ultrasonic Vibration Microscopic Penetration System Based on Piezoelectric Actuator[J]. Chinese Control Conference, 2012, 6(25): 5036-5041.

[7] LI Yang-min, TANG Hui, XU Qing-song. Micromanipulator Technology Development Trend For Biomedical Application [J] , 2011, 47(23): 1-13.

[8] WEN J M, MA J J, ZENG P. The production and performance test of piezoelectric rotary actuator[J]. Optics and Precision Engineering, 2013, 21(1): 131-136.

[9] ZHANG F X, WANG L K. Modern Piezoelectric Study[M]. Beijing: Science Press, (2001).

[10] SHI L P, SUN L N, RONG W B. Application of the First Converse and Secondary Positive Piezoelectric Effect in Self-sensing[J]. Nanotechnology and Precision Engineering. 2010, 8(3): 211-214.

[11] HAN Tong-peng, LI Guo-ping, SHEN Jie. The Research of Precise Positioning Technology Which Is Based on Piezoelectric Ceramic Actuator[J]. Sensors and Microsystems, 2010, 29(2), pp.51-53.