Preparation of Nanocrystalline Cubic Boron Nitride Coating by Magnetron Sputtering Method

Abstract:

Cubic Boron Nitride (cBN) has wide application prospect in the field of high performance cutting tool, for its outstanding mechanical properties. In this paper, the cBN coating was synthesized on cement carbide by chemical vapor deposition nanocrystalline diamond interlayer in radio frequency magnetron sputtering system. The SEM, FTIR and AFM were used to investigate the microstructure, purity and morphology of the cBN film. The research was carried out on the effect of the deposition parameters on the cBN content in the film. High temperature and high pressure locally in the substrate is an important factor of transformation of cubic phase BN from hexagonal phase BN. There is a narrow optimization parameters window in cBN synthesis by ion bombardment assist radio frequency magnetron sputtering method. The good quality of cBN film can be obtained by a combination of moderate substrate bias voltage and gas pressure, high substrate temperature and a certain N₂ partial pressure.

• Periodical: Key Engineering Materials (Volumes 656-657)
• Pages: 80-85
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.656-657.80
• Online since: July 2015
• Authors: Zhao Zhi Liu, Feng Xu*, Xu Hui Zhang, Dun Wen Zuo
• Keywords: Cubic Boron Nitride, Deposition Parameters, Ion Bombardment, RF Magnetron Sputter

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