Mechanical and Tribological Properties of HiPIMS and HiTUS W-C Based Coatings

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Several series of W-C based coatings were deposited by HiPIMS and HiTUS deposition technologies with different deposition parameters (power, frequency and pulse length in HiPIMS and pressure, acetylene content and RF bias in HiTUS). To investigate their effect on the hardness and tribological properties. The hardness of HiTUS coatings was up to 36 GPa and CoFs of these coatings were around 0.5, whereas the HiPIMS coatings exhibited lower hardness (18 – 20 GPa) but also lower CoFs (0.18 - 0.2).

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99-102

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September 2015

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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