Nanohardness of DC Magnetron Sputtered W – C Coatings as a Function of Composition and Residual Stresses

Abstract:

The effects of residual stresses in thin W-C based coatings were investigated with the aim to find their influence on nanohardness and indentation modulus. Ten samples of W-C based coatings were deposited on microslide glass substrates using DC magnetron sputtering at the identical deposition parameters. Their thickness was in the range from 500 to 600 nm. The residual stresses in the coatings varied from 1.5 GPa up to 4.4 GPa. Increase of residual stress caused linear increase of H_IT from 16 to 19.5 GPa. This increase was only the result of the compressive stresses. E_IT of the studied coatings was not sensitive to residual stresses and corresponded to 185 GPa ± 15 GPa.

• Periodical: Key Engineering Materials (Volume 662)
• Pages: 107-110
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.662.107
• Online since: September 2015
• Authors: Michal Novák*, František Lofaj, Petra Hviščová, Rudolf Podoba, Marián Haršáni, Martin Sahul, Ľubomír Čaplovič
• Keywords: Chemical Composition, DC Magnetron Sputtering, Nanohardness, Residual Stress, W – C Coatings

References

[1] R. Koch. Stress in evaporated and sputtered thin films – A comparison. Surface and Coatings Technology. 204 (2010) 1973 - (1982).

DOI: 10.1016/j.surfcoat.2009.09.047

[2] G.C.A.M. Janssen. Stress and strain in polycrystalline thin films – Critical review. Thin solid films. 515 (2007) 6654 – 6664.

DOI: 10.1016/j.tsf.2007.03.007

[3] F. Spaepen. Interfaces and stresses in thin films. Acta Materialia. 48 (2000) 31 – 42.

DOI: 10.1016/s1359-6454(99)00286-4

[4] M. Novák et al. The effect of residual stresses on nanoindentation behavior of thin W – C based coatings. Powder Metallurgy Progress. 13 (2013) 132 – 138.

[5] P. Hviščová et al. Mechanical and Tribological Properties of HiPIMS and HiTUS W – C coatings. Key Engineering Materials. submitted for publication. (2015).

DOI: 10.4028/www.scientific.net/kem.662.99

[6] O Wänstrand et al. Mechanical and tribological evaluation of PVD WC/C coatings. Surface and coatings technology 111 (1999) 247 - 254.

DOI: 10.1016/s0257-8972(98)00821-4

[7] G.F. Sun et al. Effect of annealing on microstructure and mechanical properties of laser deposited Co – 285 + WC coatings. Optics and laser technology. 66 (2015) 98 - 105.

DOI: 10.1016/j.optlastec.2014.08.005

[8] Y. Pauleau. Generation and evaluation of residual stresses in physical vapour – deposited thin films. Vacuum. 61 (2001) 175 - 181.

DOI: 10.1016/s0042-207x(00)00475-9

[9] Z.Y. Taha-al et al. Effect of WC on the residual stress in the laser treated HVOF coatings. Journal of Materials Processing Technology. 209 (2009) 3172 - 3181.

DOI: 10.1016/j.jmatprotec.2008.07.027