An Influence of the Si(111)3-4o Vicinal Surface on the Solid Phase Epitaxy of α-FeSi2 Nanorods and their Crystal Parameters

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The morphology and structure of iron silicide nanorods formed on Si (111) vicinal surface by the SPE method at T = 630 °C were studied. Optimal Fe coverage and Fe deposition rate for the formation of a dense array of the nanorods (54-65% of the substrate area) on Si (111) surface with 3-4o miscut angles were established. The aspect ratio of the nanorods is 1.9 – 3.3. Cross-sectional images of a high-resolution transmission electron microscopy (HRTEM) have shown that the nanorods have α-FeSi2 crystal structure. They are strained along the “a” axis and stretched along the “c” axis, which increased the unit cell volume by 10.3%. According to HRTEM image analysis, the nanorods have the following epitaxial relationships: α-FeSi2[01]//Si [10] and α-FeSi2(112)//Si (111). All the data obtained have provided, for the first time, a direct evidence of α-FeSi2 nanorods formation on Si (111) vicinal surface without noticeable penetration of Fe atoms into the Si substrate.

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30-35

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June 2019

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© 2019 Trans Tech Publications Ltd. All Rights Reserved

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[1] Z.-L. Peng, S. Liang, Electrical and Magnetic Properties of FeSi2 Nanowires, Chin. Phys. Lett. 25 (2008) 4113.

Google Scholar

[2] Z.-Q. Zou, X. Li, X.-Y. Liu, K.-J. Shi, X.-Q. Guo, Thermal stability of iron nanowires epitaxially grown on Si(110) substrates, Appl. Surf. Sci. 399 (2017) 200.

DOI: 10.1016/j.apsusc.2016.12.056

Google Scholar

[3] D. Daas, J.C. Mahato, B. Bisi, B. Satpati, and B.N. Dev, Self-organized patterns along sidewalls of iron silicide nanowireson Si(110) and their origin, Appl. Phys. Lett. 105 (2014) 191606.

DOI: 10.1063/1.4901815

Google Scholar

[4] Z.-L. Peng, S. Liang, L.-G. Deng, Transition Metal Silicide Nanowires Growth and Electrical Characterization, Chin. Phys. Lett. 26 (2009) 127301.

DOI: 10.1088/0256-307x/26/12/127301

Google Scholar

[5] M. Tanaka, M. Han, M. Takeguchi, F. Chu, M. Shimojo, K. Mitsuishi and K. Furyya, Morphology of iron silicide nanorods formed by electron-beam-induced deposition using ultrahigh vacuum transmission electron microscopy, Jap. J. Appl. Phys. 44 (2005) 5635.

DOI: 10.1143/jjap.44.5635

Google Scholar

[6] A. Wawro, S. Suto, R. Czaika, and A. Kasaya, The solid state reaction of Fe with the Si(111) vicinal surface: splitting of bunched steps, Nanotechnology 19 (2008) 205706.

DOI: 10.1088/0957-4484/19/20/205706

Google Scholar

[7] A. Wawro, S. Suto, R. Czaika, and A. Kasaya, Thermal reaction of iron with a Si(111) vicinal surface: Surface ordering and growth of CsCl-type iron silicide, Phys. Rev. B 67 (2003)195401.

DOI: 10.1103/physrevb.67.195401

Google Scholar

[8] S. Balagan, E. Chusovitin, D. Goroshko, O. Goroshko, Universal algorithm for scanning probe microscopy images grain analysis of objects on the surface, in: IEEE, 2017: p.19–24.

DOI: 10.1109/RPC.2017.8168059

Google Scholar

[9] S. Liang, R. Islam, D.J. Smith, P.A. Bennet, J.R.O'Brien, and B. Taylor, Magnetic iron silicide nanowires on Si(110), Appl. Phys. Lett. 88 (2006) 113111.

DOI: 10.1063/1.2185610

Google Scholar