Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

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Periodical:

Key Engineering Materials (Volumes 86-87)

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Edited by:

S. Hampshire, M. Buggy and A. J. Carr

Pages:

345-352

DOI:

10.4028/www.scientific.net/KEM.86-87.345

Citation:

M. Murtagh et al., "Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates", Key Engineering Materials, Vols. 86-87, pp. 345-352, 1993

Online since:

July 1993

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$35.00

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