Paper Titles

Simulation of Ion Beam-Induced Collisional Processes in Thin Film Titanium Silicide
p.307

Materials Engineering Aspects of Magneto-Optic Recording Materials
p.313

Preparation and Characterisation of Insulating Homogeneous Thick Films
p.321

Finite Element Thermal Modelling of the Laser Soldering Process
p.329

Visible and Infrared Optical Reflectance Spectroscopy of Silicon on Insulator Substrates
p.337

Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates
p.345

Incoming Inspection of Silicon-on-Insulator Substrates Using Spectroscopic and Single Wavelength Ellipsometry
p.353

Acoustic Microscopy of Tape Automated Bonding (TAB) Tape for Interconnection and Packaging Applications
p.361

Materials Ireland-3RD Generation R & D Management
p.369

HomeKey Engineering MaterialsKey Engineering Materials Vols. 86-87Investigation of the Influence of Gas Pressure on...

Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates

Article Preview

Abstract:

You might also be interested in these eBooks

Engineered Materials

Info:

Periodical:

Key Engineering Materials (Volumes 86-87)

Pages:

345-352

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.86-87.345

Citation:

Cite this paper

Online since:

July 1993

Authors:

M. Murtagh, S. Lynch, P.V. Kelly, P.A.F. Herbert, G.M. Crean

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1993 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: