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HomeKey Engineering MaterialsKey Engineering Materials Vols. 86-87Incoming Inspection of Silicon-on-Insulator...

Incoming Inspection of Silicon-on-Insulator Substrates Using Spectroscopic and Single Wavelength Ellipsometry

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Engineered Materials

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Periodical:

Key Engineering Materials (Volumes 86-87)

Pages:

353-360

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.86-87.353

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Online since:

July 1993

Authors:

S. Lynch, G.M. Crean

Keywords:

Ellipsometry, Process Control, Silicon-on-Insulator (SOI)

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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