Rapid Synthesis of Aluminum Nitride Nanopowders from Gaseous Aluminum Chloride

Abstract:

The synthesis of aluminum nitride (AlN) powders is traditionally completed through a thermal nitridation process, in which the reacting aluminum powders are combined with nitrogen at high temperatures with a long reaction time (usually several hours). Moreover, the occurrence of agglomeration within the melting Al particles results in a poor dispersibility of AlN powders, with a low efficiency of nitridation. In this study, an atmosphere-pressure microwave plasma preceded the rapid gas-gas synthesis process. In the reactor, the gaseous aluminum chloride (AlCl₃) reactant was fed at different positions (R1, R2, R3) to react with nitrogen at various reaction temperatures (690~1150°C) to rapidly produce AlN nano powders (in several seconds). The process was operated at a total flow rate of 13 slm with NH₃ gas content of 0 or 0.77% and an applied power of 1200/1400 W. Results showed that the high purity and dispersibility of AlN powders were found at a AlCl₃ feeding position closer to the resonant cavity of the reactor (R3, 1150°C). The AlN particle size was in the range of 25-50 nm. The experiments indicated that the gas-gas reaction for rapidly synthesizing AlN nanopowders can be successfully carried out via an AlCl₃-N₂ plasma-chemical approach.

• Periodical: Key Engineering Materials (Volume 862)
• Pages: 88-93
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.862.88
• Online since: September 2020
• Authors: Fu Lin Chu, Lai Wang Wang, Meng Yung Sun, Cheng Hsien Tsai*
• Keywords: Discharge, Gas-Phase Synthesis, Nanoparticles, Nitridation

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