Beam-Induced Annealing of Defects Created by Imlantation at 30 K in Si

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 10-12)

Edited by:

H.J. von Bardeleben

Pages:

1129-1134

Citation:

B. B. Nielsen and J.U. Andersen, "Beam-Induced Annealing of Defects Created by Imlantation at 30 K in Si", Materials Science Forum, Vols. 10-12, pp. 1129-1134, 1986

Online since:

January 1986

Export:

Price:

$38.00

Fetching data from Crossref.
This may take some time to load.