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HomeMaterials Science ForumMaterials Science Forum Vols. 10-12Structural Defects in Ion-Implanted Silicon...

Structural Defects in Ion-Implanted Silicon Observed by Perturbed Angular Correlation

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Defects in Semiconductors 14

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Periodical:

Materials Science Forum (Volumes 10-12)

Pages:

1141-1146

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.10-12.1141

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Online since:

January 1986

Authors:

Manfred Deicher, G. Grübel, E. Recknagel, Th. Wichert

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© 1986 Trans Tech Publications Ltd. All Rights Reserved

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