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Annealing Behaviour of High Concentration of Sn and Sb Implanted in Silicon

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Periodical:

Materials Science Forum (Volumes 10-12)

Pages:

1135-1140

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.10-12.1135

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Online since:

January 1986

Authors:

G. Weyer, Arne Nylandsted-Larsen, F.T. Pedersen, R. Galloni, R. Rizzoli

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© 1986 Trans Tech Publications Ltd. All Rights Reserved

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