Extreme Environment Integrated Circuits Based on Enhancement Mode SiC JFETs

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Abstract:

This paper presents results on developing high temperature capable SiC JFET based IC technology that can operate at temperatures up to 500 °C. All JFET devices are fully planar, formed by ion implantation, and the device design allows the use of semi-insulating or conductive SiC substrates. Basic analog and logic ICs were built in order to demonstrate the technology high temperature capability. All circuits used enhancement mode n-channel JFETs as active transistors, and depletion mode transistors as active loads. The logic circuits built included NOT, NAND, and NOR gates. The analog circuits built included a simple one-stage operational amplifier. JFETs and ICs were packaged in ceramic packages and tested at temperatures up to 500 °C.

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Periodical:

Materials Science Forum (Volume 1004)

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1097-1103

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Online since:

July 2020

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© 2020 Trans Tech Publications Ltd. All Rights Reserved

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