Crystal Separation Method of 6-Inch 4H-SiC Crystal Using Adhesion Shrinkage between a Seed and a Seed Holder in Cooling Process

Jong Hwi Park; Byung Kyu Jang; Jung Woo Choi; Eunsu Yang; Jung Gyu Kim; Sang Ki Ko; Myung Ok Kyun; Kap Ryeol Ku; Dae Sung Kim; Won Jae Lee

doi:10.4028/www.scientific.net/MSF.1004.26

Paper Titles

Preface

Fast 4H-SiC Bulk Growth by High-Temperature Gas Source Method
p.5

Development of 150-mm 4H-SiC Substrates Using a High-Temperature Chemical Vapor Deposition Method
p.14

Investigation of Carbon Inclusions in SiC Crystals Grown by PVT Method
p.20

Crystal Separation Method of 6-Inch 4H-SiC Crystal Using Adhesion Shrinkage between a Seed and a Seed Holder in Cooling Process
p.26

Modified Hot-Zone Design of Growth Cell for Reducing the Warpage of 6”-SiC Wafer
p.32

Progress in Bulk 4H SiC Crystal Growth for 150 mm Wafer Production
p.37

Investigation of Dislocation Behavior at the Early Stage of PVT-Grown 4H-SiC Crystals
p.44

Investigation on the Threading Dislocations Formed by Lattice Misfits during Initial Stage of Sublimation Growth of 4H-SiC
p.51

HomeMaterials Science ForumMaterials Science Forum Vol. 1004Crystal Separation Method of 6-Inch 4H-SiC Crystal...

Crystal Separation Method of 6-Inch 4H-SiC Crystal Using Adhesion Shrinkage between a Seed and a Seed Holder in Cooling Process

Abstract:

6-inch 4H-SiC crystal ingot was successfully separated from a seed holder by the contraction enhancement of adhesive. The resin used as an adhesive with 10~30% in contraction ratio during the cooling was selected. The crack between seed holder and grown SiC crystal was observed to be formed after the cooling procedure and the crystal was easily separated from the seed holder without any machining process for the separation. The warp value and the rocking curve value of SiC crystal grown with modified adhesive was observed to be smaller than those of SiC crystal with conventional method.

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Periodical:

Materials Science Forum (Volume 1004)

Pages:

26-31

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.1004.26

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Online since:

July 2020

Authors:

Jong Hwi Park, Byung Kyu Jang, Jung Woo Choi, Eunsu Yang, Jung Gyu Kim, Sang Ki Ko, Myung Ok Kyun, Kap Ryeol Ku, Dae Sung Kim, Won Jae Lee*

Keywords:

Adhesive Contraction, Crystal Quality, Crystal Separation, Warp

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