Shifts of the Infrared Absorption Peaks of Oxygen in Silicon Caused by Germanium-Doping
p.207
p.207
Observation of Five Additional Thermal Donors and Kinetics of Thermal Donor Formation and Annihilation at Temperatures above 500°C in Czochralski-Grown Si
p.213
p.213
Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals
p.219
p.219
Formation of Oxygen Clusters in Quenched Cz- and MCz-Si Crystals
p.225
p.225
Simulation of Oxygen Precipitation and Denuded Zone Formation during Thermal Anneals
p.231
p.231
Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon
p.237
p.237
Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation Using Tertiarybutylarsine (tBAs)
p.243
p.243
Effective-Mass-Like Excited Pseudo-Donor States of a Complex Metastable Defect in Silicon
p.249
p.249
Zeeman Study of 735meV Photoluminescence Band in Iron-Doped Silicon
p.255
p.255
Simulation of Oxygen Precipitation and Denuded Zone Formation during Thermal Anneals
Abstract:
You might also be interested in these eBooks
Info:
Periodical:
Materials Science Forum (Volumes 117-118)
Pages:
231-236
Citation:
Online since:
January 1993
Authors:
Keywords:
Price:
Сopyright:
© 1993 Trans Tech Publications Ltd. All Rights Reserved
Share:
Citation: