Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

219-224

DOI:

10.4028/www.scientific.net/MSF.117-118.219

Citation:

A. Hara et al., "Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals ", Materials Science Forum, Vols. 117-118, pp. 219-224, 1993

Online since:

January 1993

Export:

Price:

$35.00

In order to see related information, you need to Login.