Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals

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Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

219-224

Citation:

A. Hara et al., "Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals ", Materials Science Forum, Vols. 117-118, pp. 219-224, 1993

Online since:

January 1993

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