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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147Annealing of Electron Irradiated P-, As-, Sb- and...

Annealing of Electron Irradiated P-, As-, Sb- and Bi-Doped Czochralski Silicon

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

1239-1244

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.1239

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Online since:

October 1993

Authors:

T. Hallberg, J. Lennart Lindström, Bengt Gunnar Svensson, Krzysztof Swiatek

Keywords:

Complex Defect, Czochralski Silicon, Electron Irradiation

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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