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HomeMaterials Science ForumMaterials Science Forum Vols. 166-169X-Ray Diffraction Studies and Ellipsometric...

X-Ray Diffraction Studies and Ellipsometric Diagnostics of Thin α-Ti Growth Films in Plasma Activated Physical Vapour Deposition

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Periodical:

Materials Science Forum (Volumes 166-169)

Pages:

313-318

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.166-169.313

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Online since:

July 1994

Authors:

Harm Wulff, H. Steffen, V. Krasemann, J. Klimke

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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