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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Scratch-Related Effects on Silicon Surface

Scratch-Related Effects on Silicon Surface

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1231-1236

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1231

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Online since:

November 1995

Authors:

Y.G. Shreter, Y.T. Rebane, D.V. Tarhin, D. Cherns, John W. Steeds

Keywords:

Phase Transition, Scratches, Silicon, Surface Instability

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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