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HomeMaterials Science ForumMaterials Science Forum Vols. 255-257Vacancy-Hydrogen Interaction in Proton-Implanted...

Vacancy-Hydrogen Interaction in Proton-Implanted Si Studied by Positron Lifetime and Infrared Absorption Measurements

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Periodical:

Materials Science Forum (Volumes 255-257)

Pages:

548-550

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.255-257.548

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Online since:

September 1997

Authors:

Atsuo Kawasuso, Hiroki Arai, Sohei Okada

Keywords:

Hydrogen, Infrared Absorption, Positron Lifetime, Proton Implantation, Vacancy

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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