The Influence of Accumulated Defects on the Lateral Spread of Implanted Ions

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Periodical:

Materials Science Forum (Volumes 258-263)

Edited by:

Gordon Davies and Maria Helena Nazaré

Pages:

641-646

DOI:

10.4028/www.scientific.net/MSF.258-263.641

Citation:

S.T. Nakagawa "The Influence of Accumulated Defects on the Lateral Spread of Implanted Ions", Materials Science Forum, Vols. 258-263, pp. 641-646, 1997

Online since:

December 1997

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