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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Impurity Incorporation During Sublimation Bulk...

Impurity Incorporation During Sublimation Bulk Crystal Growth of 6H- and 4H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

49-52

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.49

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Online since:

February 1998

Authors:

Noboru Ohtani, Masakazu Katsuno, J. Takahashi, Hirokatsu Yashiro, M. Kanaya, S. Shinoyama

Keywords:

Atomic Force Microscope (AFM), Impurity Incorporation, Sublimation Bulk Growth

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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