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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Laser Alloying for Ohmic Contacts on SiC at Room...

Laser Alloying for Ohmic Contacts on SiC at Room Temperature

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

783-786

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.783

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Online since:

February 1998

Authors:

Yoshio Ota, Yasushi Ikeda, Makoto Kitabatake

Keywords:

Alloy, Contact Resistivity, Diode, Laser, Ohmic Contact, Schottky

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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