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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Delamination of Thin Layers in H+ Implanted...

Delamination of Thin Layers in H⁺ Implanted Silicon Carbide

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

771-774

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.771

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Online since:

February 1998

Authors:

Tohru Hara, Y. Kakizaki, Hisao Tanaka, M. Inoue, K. Kajiyama, T. Yoneda, Kohei Sekine, K. Masao

Keywords:

Delamination, Ellipsometry, Hydrogen Implantation, Thin Layer

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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