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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Deuterium Incorpoation in Acceptor Doped Epitaxial...

Deuterium Incorpoation in Acceptor Doped Epitaxial Layers of 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

761-764

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.761

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Online since:

February 1998

Authors:

Margareta K. Linnarsson, Martin S. Janson, Adolf Schöner, Nils Nordell, S. Karlsson, Bengt Gunnar Svensson

Keywords:

Deuterium, Diffusion, SIMS

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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