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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Ion Beam Synthesis: A Novel Method of Producing...

Ion Beam Synthesis: A Novel Method of Producing (SiC)_1-x(AIN)_x Layers

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Silicon Carbide, III-Nitrides and Related Materials

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

753-756

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.753

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Online since:

February 1998

Authors:

R.A. Yankov, W. Fukarek, M. Voelskow, Joerg Pezoldt, Wolfgang Skorupa

Keywords:

Buried Layers, Damage, Dynamic Annealing, Ion Implantation

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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