Plasma Enhanced Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous SiC Films on Si

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

325-328

DOI:

10.4028/www.scientific.net/MSF.338-342.325

Citation:

Y. H. Wang et al., "Plasma Enhanced Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous SiC Films on Si", Materials Science Forum, Vols. 338-342, pp. 325-328, 2000

Online since:

May 2000

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$35.00

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