Quantified Conditions for Reduction of ESO Contamination During SiC Metalization

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

407-410

DOI:

10.4028/www.scientific.net/MSF.338-342.407

Citation:

G.Y. McDaniel et al., "Quantified Conditions for Reduction of ESO Contamination During SiC Metalization", Materials Science Forum, Vols. 338-342, pp. 407-410, 2000

Online since:

May 2000

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Price:

$35.00

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