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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Quantified Conditions for Reduction of ESO...

Quantified Conditions for Reduction of ESO Contamination During SiC Metalization

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

407-410

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.407

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Online since:

May 2000

Authors:

G.Y. McDaniel, S.T. Fenstermaker, D.E. Walker Jr., W.V. Lampert, S.M. Mukhopadhyay, P.H. Holloway

Keywords:

Adsorption Kinetics, Auger Electron Spectroscopy (AES), Surface Kinetics

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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