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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Electrical and Physical Behavior of SiC Layers on...

Electrical and Physical Behavior of SiC Layers on Insulator (SiCOI)

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

715-718

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.715

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Online since:

May 2000

Authors:

E. Hugonnard-Bruyère, Fabrice Letertre, Lea Di Cioccio, Hans Jürgen von Bardeleben, J.L. Cantin, Thierry Ouisse, Thierry Billon, Gérard Guillot

Keywords:

Deep Level, EPR Spectroscopy, Hall-Effect Measurement, SiC On Insulator, Smart-Cut^®

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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