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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Electron-Irradiation-Induced Amorphization of...

Electron-Irradiation-Induced Amorphization of 6H-SiC by 300 keV Transmission Electron Microscope Equipped with a Field-Emission Gun

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

467-470

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.467

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Online since:

April 2002

Authors:

In-Tae Bae, Manabu Ishimaru, Yoshihiko Hirotsu

Keywords:

Amorphisation, Electron Irradiation, Field-Emission Gun, Threshold Displacement Energy

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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