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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Atomic-Step Observations on 6H- and 15R-SiC...

Atomic-Step Observations on 6H- and 15R-SiC Polished Surfaces

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

729-732

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.729

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Online since:

April 2002

Authors:

Patrice Vicente, Etienne Pernot, Didier Chaussende, Jean Camassel

Keywords:

Atomic Steps, Chemico-Mechanical Polishing, Surface Preparation

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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