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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436Modelling the Formation of Nano-Sized SiC on Si

Modelling the Formation of Nano-Sized SiC on Si

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

591-594

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.591

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Online since:

September 2003

Authors:

K.L. Safonov, Alexander A. Schmidt, Dmitri V. Kulikov, Volker Cimalla, Joerg Pezoldt

Keywords:

Cluster Formation, Computer Simulation, Rate Equations, Silicon Carbide (SiC), Surface Diffusion

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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