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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436Surface Properties and Electrical Characteristics...

Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

609-612

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.609

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Online since:

September 2003

Authors:

Anton J. Bauer, Martin Rambach, Lothar Frey, Roland Weiss, Roland Rupp, Peter Friedrichs, Reinhold Schörner, Dethard Peters

Keywords:

4H-SiC, Ion Implantation, RTP, Sheet Resistance, Surface Roughness (SR)

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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