Structure and Phase Composition Study of Thin CdS and CdxZn1-xS Films

E.A. Maximovski; N.I. Fainer; M. Rumyantsev

doi:10.4028/www.scientific.net/MSF.443-444.197

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HomeMaterials Science ForumMaterials Science Forum Vols. 443-444Structure and Phase Composition Study of Thin CdS...

Structure and Phase Composition Study of Thin CdS and Cd_xZn_1-xS Films

Abstract:

Thin nanocrystalline CdS and CdxZn1-xS films have been synthesized on InP(100), Si(100), GaAs (100), sapphire(100) and fused silica substrates at low pressure (5 × 10^-2-2 × 10 ^-1Torr)and in the temperature range of 473-673 K by remote plasma enhanced chemical vapor deposition (RPECVD) using Cd(S₂CN(C₂H₅)₂)₂·C₁₂H₈N₂ and Cd/Zn(S₂CN(C₂H₅)₂)₂·C₁₀H₈N₂ as single-source precursors. The influence of deposition conditions and type of substrates on physical and chemical properties of these films has been studied by X-ray diffraction of synchrotron radiation, HREM, SEM, SAED, ellipsometry, IR- and Raman spectroscopies, and EDS.