The Comparison Study of Field Emission Characteristics from (002)-Oriented AlN and W Tip

Abstract:

By using radio frequency magnetron reactive sputtering system, (002)-oriented AlN film was deposited on W tip. The field emission from (002)-oriented AlN film on W tip was studied and compared with that from the bare W tip in a high vacuum (≤10-6 Pa) chamber. It indicated that the enhanced electron emission could be obtained from the (002)-oriented AlN film on W tip. The corresponding Fowler-Nordheim plot of AlN presented a nonlinear behavior in nature related the high resistivity of AlN. Furthermore, the current-electric field (I-E) curve presented excellent reproducibility checked by repeated measurements.

• Periodical: Materials Science Forum (Volumes 475-479)
• Pages: 3591-3594
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.475-479.3591
• Online since: January 2005
• Authors: Shuang Lin Yue, C.Y. Zhi, Chang Zhi Gu
• Keywords: Aluminum Nitride (AlN), Field Emission, W Tip

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