The Comparison Study of Field Emission Characteristics from (002)-Oriented AlN and W Tip

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By using radio frequency magnetron reactive sputtering system, (002)-oriented AlN film was deposited on W tip. The field emission from (002)-oriented AlN film on W tip was studied and compared with that from the bare W tip in a high vacuum (≤10-6 Pa) chamber. It indicated that the enhanced electron emission could be obtained from the (002)-oriented AlN film on W tip. The corresponding Fowler-Nordheim plot of AlN presented a nonlinear behavior in nature related the high resistivity of AlN. Furthermore, the current-electric field (I-E) curve presented excellent reproducibility checked by repeated measurements.

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Periodical:

Materials Science Forum (Volumes 475-479)

Main Theme:

Edited by:

Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie

Pages:

3591-3594

DOI:

10.4028/www.scientific.net/MSF.475-479.3591

Citation:

S. L. Yue et al., "The Comparison Study of Field Emission Characteristics from (002)-Oriented AlN and W Tip", Materials Science Forum, Vols. 475-479, pp. 3591-3594, 2005

Online since:

January 2005

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$38.00

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