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HomeMaterials Science ForumMaterials Science Forum Vols. 475-479The Thermal Annealing Effect on the Residual...

The Thermal Annealing Effect on the Residual Stress and Mechanical Property in the Compressive Stressed DLC Film

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Periodical:

Materials Science Forum (Volumes 475-479)

Pages:

3619-3622

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.475-479.3619

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Online since:

January 2005

Authors:

H.W. Choi, M.W. Moon, T.Y. Kim, Kwang Real Lee, Kyu Hwan Oh

Keywords:

Compressive Stress, Diamond-Like Carbon (DLC), Stress Reduction, Thermal Annealing

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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