Microstructures and Properties of the DLC Films Prepared by PLD Process Using High Power High Frequency 308 nm Laser Beam

Abstract:

DLC and nanocrystalline diamond films were prepared by PLD process using 308 nm(XeCl) laser beam with high power(200-500 W) and high frequency(200-500 Hz). The effects of some parameters such as the laser power density, the repetition rate on the structures and characters of the DLC films under such extreme power and repetition rate conditions were studied for the first time. The results indicated that: (1) The microstructures of the films were varied from amorphous to nanocrystalline with the laser power density increased from 108 W/cm2 to 1010 W/cm2; (2) The properties of the films grew at 200 Hz and 300 Hz were better than that of the films grew at 500 Hz, with the laser power density remained constant at 1010 W/cm2.

• Periodical: Materials Science Forum (Volumes 475-479)
• Pages: 3631-3634
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.475-479.3631
• Online since: January 2005
• Authors: Hong Yan Peng, Li Xin Zhao, Zeng Sun Jin, Bao Ling Chen, Bing Zhang, Chuansheng Zhou, Mei Heng Zhang, Xinghui Yang
• Keywords: DLC Film, High Power Frequency Laser Beam, PLD

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