Low Stress Tetrahedral Amorphous Carbon Films Prepared by Filtered Vacuum Arc Deposition

Xu Zhang; Hui Xing Zhang; Xiang Ying Wu; Tong He Zhang

doi:10.4028/www.scientific.net/MSF.475-479.3623

Paper Titles

The Fabrication and Performance of CVD Diamond-Based X-Ray Detectors
p.3605

Fabrication of Structure-Designed Free-Standing Diamond Film
p.3611

Analysis of Interface between Free-Standing Diamond Films and Mo Substrates
p.3615

The Thermal Annealing Effect on the Residual Stress and Mechanical Property in the Compressive Stressed DLC Film
p.3619

Low Stress Tetrahedral Amorphous Carbon Films Prepared by Filtered Vacuum Arc Deposition
p.3623

Influence of Film Thickness on Intrinsic Growth Stress and Raman Evaluation of Tetrahedral Amorphous Carbon Films
p.3627

Microstructures and Properties of the DLC Films Prepared by PLD Process Using High Power High Frequency 308 nm Laser Beam
p.3631

Improvement of Adhesion of Cubic Boron Nitride Films: Effect of Interlayer and Deposition Parameters
p.3635

Evolution of Stress-Induced Surface Damage and Stress-Relaxation of Electroplated Cu Films at Elevated Temperatures
p.3641

HomeMaterials Science ForumMaterials Science Forum Vols. 475-479Low Stress Tetrahedral Amorphous Carbon Films...

Low Stress Tetrahedral Amorphous Carbon Films Prepared by Filtered Vacuum Arc Deposition

Abstract:

The tetrahedral amorphous carbon films are attracting materials because of their properties similar to diamond, such as high hardness, resistivity, optical transparency, chemical inertness and low coefficient of friction. These properties make it ideal for wear resistance application on cutting tools, automotive component, aerospace components and orthopedic prosthesis etc. In this paper the structures, mechanical properties and wear resistance of the tetrahedral amorphous carbon films deposited on silicon under lower pulse bias voltage by filtered catholic vacuum arc deposition system have been investigated. The high quality tetrahedral amorphous carbon film has been obtained. The hardness and elastic modulus of the low stress tetrahedral amorphous carbon films are higher than 60Gpa and 380Gpa respectively determined by nano indentation tests. The friction performance of the tetrahedral amorphous carbon films was also studied by SRV tests, the results show: the tetrahedral amorphous carbon films have much lower wear rate than that of silicon substrate.

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Periodical:

Materials Science Forum (Volumes 475-479)

Pages:

3623-3626

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.475-479.3623

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Online since:

January 2005

Authors:

Xu Zhang, Hui Xing Zhang, Xiang Ying Wu, Tong He Zhang

Keywords:

Filtered Arc, Tetrahedral Carbon, Wear Resistance

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