Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process

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Periodical:

Materials Science Forum (Volumes 475-479)

Main Theme:

Edited by:

Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie

Pages:

3779-3782

DOI:

10.4028/www.scientific.net/MSF.475-479.3779

Citation:

C. G. Kang et al., "Finite Element Analysis of Nano/Micro Pattern Fabrication by Nanoscratch Process", Materials Science Forum, Vols. 475-479, pp. 3779-3782, 2005

Online since:

January 2005

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$35.00

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