Field Emission Properties of Nanocrystalline and Amorphous Silicon Carbon Nitride Prepared from Microwave Plasma Chemical Vapor Deposition

Abstract:

Silicon carbon nitride (SiCN) films have been deposited on silicon wafers by microwave plasma chemical vapor deposition (MPCVD). Gas mixture of H2, CH4, N2, and SiH4 was used as precursors, in which the flow rate of N2 was changed. X-ray photoelectron spectroscopy (XPS) and micro-Raman spectroscopy were employed to characterize the composition and bonding structures, while field-emission scanning electron microscopy were used to investigate the microstructure of the films. With increasing the flow rate of N2 from 50 sccm to 300 sccm, the SiCN films changed from amorphous to nanocrystalline. Characteristic current-voltage measurements indicate a low turn-on field of 10.8 V/µm. Field emission current density of 4.5 mA/cm2 has been observed at 20 V/µm.

• Periodical: Materials Science Forum (Volumes 480-481)
• Pages: 65-70
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.480-481.65
• Online since: March 2005
• Authors: Wen Juan Cheng, Jin Chun Jiang, Yang Zhang, De Zhong Shen, He Sun Zhu
• Keywords: Amorphous, Field Emission, MPCVD, Nanocrystalline, SiCN

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