[01-15] Grown 6H-SiC Bulk Crystals Investigated by High Energy Triple Axis X-Ray Diffraction

Christoph Seitz; Z.G. Herro; Boris M. Epelbaum; Albrecht Winnacker; Rainer Hock; Andreas Magerl

doi:10.4028/www.scientific.net/MSF.483-485.307

Paper Titles

RBS-Channeling and EPR Studies of Damage in 2 MeV Al²⁺-Implanted 6H-SiC Substrates
p.291

Microstructural Characterization of 3C-SiC Thin Films Grown by Flash Lamp Induced Liquid Phase Epitaxy
p.295

Dynamical Study of Dislocations and 4H → 3C Transformation Induced by Stress in (11-20) 4H-SiC
p.299

Pressure Effect on the Elastic Properties of SiC Polytypes
p.303

[01-15] Grown 6H-SiC Bulk Crystals Investigated by High Energy Triple Axis X-Ray Diffraction
p.307

XRDT Study of Structural Defects of 6H-SiC Crystals
p.311

Defect Characterization of 4H-SiC Bulk Crystals Grown on Micropipe Filled Seed Crystals
p.315

PVT-Growth and Characterization of Single Crystalline 3C-SiC on a (0001) 6H-SiC Substrate
p.319

Structure of In-Grown Stacking Faults in the 4H-SiC Epitaxial Layers
p.323

HomeMaterials Science ForumMaterials Science Forum Vols. 483-485[01-15] Grown 6H-SiC Bulk Crystals Investigated by...

[01-15] Grown 6H-SiC Bulk Crystals Investigated by High Energy Triple Axis X-Ray Diffraction

Abstract:

A structural characterisation of the first [01-15] grown 6H SiC crystals is presented. They show a different micro domain structure outside the facetted region as compared to conventionally [0001] grown crystals. It is imposed by the reduced rotational symmetry for this direction which favours the activation of a low number of glide systems.