Effects of CH4 Concentration on CVD Diamond Coatings Deposited on Cemented Carbide Cutting Cools

Wen Zhuang Lu; Dun Wen Zuo; Min Wang; Feng Xu

doi:10.4028/www.scientific.net/MSF.532-533.480

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HomeMaterials Science ForumMaterials Science Forum Vols. 532-533Effects of CH4 Concentration on CVD Diamond...

Effects of CH₄ Concentration on CVD Diamond Coatings Deposited on Cemented Carbide Cutting Cools

Abstract:

Chemical vapor deposition (CVD) diamond coatings were deposited on cemented carbide cutting cools by an electron-assisted hot filament chemical vapor deposition (EACVD) equipment developed by the authors. The CVD diamond coatings were studied by Scanning Electron Microscope (SEM) and Raman Scattering Spectroscopy (Raman). The experimental results show that CH4 concentration in the source gas performs great influence on the micro-structure, surface roughness, composition, residual stress and adhesion of the CVD diamond coatings. The increase of CH4 concentration results the change of diamond crystal from {111} orientation to {100} orientation, the decrease of the surface roughness and the increase of sp2 carbon in the CVD diamond coatings. A residual compressive stress exists in the CVD diamond coatings. The residual stress decreases with increasing CH4 concentration. A higher or lower CH4 concentration tends to reduce adhesion stress of the continuous CVD diamond coatings.

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Periodical:

Materials Science Forum (Volumes 532-533)

Pages:

480-483

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.532-533.480

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Online since:

December 2006

Authors:

Wen Zhuang Lu, Dun Wen Zuo, Min Wang, Feng Xu

Keywords:

CH₄ Concentration, Cutting-Tool Coating, CVD Diamond Film

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