Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC

M. Obernhofer; M. Krieger; Frank Schmid; Heiko B. Weber; Gerhard Pensl; Adolf Schöner

doi:10.4028/www.scientific.net/MSF.556-557.343

Paper Titles

Contactless Electrical Defect Characterization and Topography of a-Plane Grown Epitaxial Layers
p.327

Deep Levels in Electron-Irradiated n- and p-type 4H-SiC Investigated by Deep Level Transient Spectroscopy
p.331

Dependence of DAP Emission Properties on Impurity Concentrations in N-/B-co-doped 6H-SiC
p.335

Determination of Impact Ionization Coefficients Measured from 4H Silicon Carbide Avalanche Photodiodes
p.339

Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC
p.343

Electrical Characterisation of 4H-SiC Epitaxial Samples Treated by Hydrogen or Helium
p.347

Electric-Field Screening Effects in the Micro-Photoluminescence Spectra of As-Grown Stacking Faults in 4H-SiC
p.351

EPR, ESE and Pulsed ENDOR Study of Nitrogen Related Centers in 4H-SiC Wafers Grown by Different Technologies
p.355

Excess Carrier Lifetimes in a Bulk p-Type SiC Wafer Measured by the Microwave Photoconductivity Decay Method
p.359

HomeMaterials Science ForumMaterials Science Forum Vols. 556-557Electrical and Structural Properties of...

Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC

Abstract:

Aluminum ions (Al+) were implanted at room temperature or at 500°C into n-type 4HSiC. The implantation damage (displaced Si atoms) and the electrical activation of Al+ ions (concentration of Al acceptors) were determined by Rutherford backscattering in channeling mode and Hall effect, respectively, as a function of the annealing temperature.

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Periodical:

Materials Science Forum (Volumes 556-557)

Pages:

343-346

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.556-557.343

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Online since:

September 2007

Authors:

M. Obernhofer, M. Krieger, Frank Schmid, Heiko B. Weber, Gerhard Pensl, Adolf Schöner

Keywords:

Al Acceptor, Electrical Activation, Hall-Effect, Rutherford Backscattering

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References

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